The Physics of Submicron Lithography by Valiev, Kamil A.

The Physics of Submicron Lithography

New York: Plenum Press, 1992. Glossy printed boards. pp 493, index. Damp spotting to spine ends, with creased nick at foot of spine; a few small tan spots to endpapers; evidence of damp (but no tide marks) to lower outer corners of text; else a VG clean, tight and unworn copy, no owner marks. This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. Microdevices, Physic and Fabrication Technologies series. In print (2018) at USD 280.00. 1.5 kg parcel.; Tall octavo 0306435780

Book ID: 49987
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